类型:低温泵 | 型号:8112578G001 | 别名:Roughing Valve |
用途:粗抽 | 品牌:CTI | 种类:粗抽阀 |
加工定制:否 |
CTI 8112578G001 ROUGHING VALVE 60-80 PSI
CAUTION 1. Disconnect electrical power from cryopump before removing the roughing valve. 2. Shut off gas supply and release gas pressure in gas supply line prior to roughing valve removal. 3. Warm up the cryopump to ambient room temperature before removing the roughing valve; this will prevent contamination of the arrays.