品牌:CTI | 型号:8116152G001 | 用途:高真空获得 |
类型:低温泵 | 种类:OB |
Part Number:8116152G001 Serial Number:C0872850 CE Marked:Yes
Link to the Datasheet:CTI On-Board Family Cryopump Datasheet
Link to the Manual:CTI On-Board Family Cryopump Manual
Specifications: Configuration:Flat Vacuum Flange ID:250 mm (Metal Seal, ANSI, and ***) Gas Pumping Speeds: Water:6,500 Liters/Sec. Air:2,200 Liters/Sec. Hydrogen:3,200 Liters/Sec. Argon:1,800 Liters/Sec. Gas Capacities: Hydrogen:16 Standard Liters Argon:1,000 Standard Liters Throughput: Argon:700 Sccm (9 Torr-Liters/Sec.) Crossover:150 Torr-Liters Full Regeneration (Typical):< 3.3 hrs Fast Regeneration (Typical):< 1.5 hrs Cryopump Weight:58 lbs. (26 Kg)